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World Journal of Engineering Research and Technology

( An ISO 9001:2015 Certified International Journal )

An International Peer Reviewed Journal for Engineering Research and Technology

An Official Publication of Society for Advance Healthcare Research (Reg. No. : 01/01/01/31674/16)

ISSN 2454-695X

Impact Factor : 7.029

ICV : 79.45

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Indexing

Abstract

STUDY OF THE EFFECT OF PROTONS AND PLATINUM ATOMS ON THE CRYSTAL STRUCTURE OF SILICON USING X-RAY DIFFRACTION

Sh. B. Utamuradova1, A. V. Stanchyk and D. A. Rakhmanov*

ABSTRACT

In this work, the influence of hydrogen ions and platinum atoms on the structure of silicon samples was studied. For the study, single-crystal n-type silicon samples were used, which were doped with phosphorus during growth. These samples were irradiated with protons with an energy of 600 keV and a current of 1÷1.5 ?A at an irradiation dose of 9 × 1014 cm-2. To study the surface layer, it was used with the X-ray diffraction method.

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