Abstract
STUDY OF THE EFFECT OF PROTONS AND PLATINUM ATOMS ON THE CRYSTAL STRUCTURE OF SILICON USING X-RAY DIFFRACTION
Sh. B. Utamuradova1, A. V. Stanchyk and D. A. Rakhmanov*
ABSTRACT
In this work, the influence of hydrogen ions and platinum atoms on the structure of silicon samples was studied. For the study, single-crystal n-type silicon samples were used, which were doped with phosphorus during growth. These samples were irradiated with protons with an energy of 600 keV and a current of 1?1.5 ?A at an irradiation dose of 9 ? 1014 cm-2. To study the surface layer, it was used with the X-ray diffraction method.
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