Abstract
A NOVEL MEMS BASED MICROHEATER FOR GAS SENSING APPLICATIONS USING COMSOL
L. Sujatha*, V. S. Selvakumar, S. Suganthi and C. V. Gayathri
ABSTRACT
Micro-Heaters have been the subject of great interest owing to their extensive applications in gas sensors, humidity sensors and other micro-systems. A micro-heater should have low power consumption, low thermal mass and better temperature uniformity. In this paper, we have looked for geometric optimization of the heater structure to achieve high temperature uniformity by performing analysis using COMSOL Multiphysics 4.2, a Finite Element Analysis (FEA) Package. We have presented four different patterns of micro-heater, namely Single Meander, double meander, fan shape and square shape of 500×500?m with their Electro-thermal simulated temperature profile. The Maximum Temperature of 642.75 K was obtained. For the same supply voltage applied, it was found that the Square shape structure gave the best result with 99.51% of the heater area having a temperature greater than 90 % of the maximum temperature attained with an average temperature of 642.75 K.
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