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DESIGN AND SIMULATION OF POROUS SILICON BASED GAS SENSOR
Selvakumar V. S.*, Joshua Harry Paul, Joseph Nirmal Rajkumar I., Manoj M.
A thin film MEMS based humidity sensor is designed & analyzed using Intellisuite CAD software. Measuring instruments for humidity usually rely on quantity measurements such as temperature, pressure, air or gas volume, etc. The main motivation behind this study is the need in the automotive, food / beverage, cosmetics, and pharmaceutical industries. Here the structure of the sensor holds a very thin film that detects the presence of gasses such as ethanol, propane, steam, hydrogen, etc. Variation of parameters such as temperature, resistance, potential difference across sensing electrodes can calculate the presence of sensing layer.[Full Text Article]